• Research

    Yonsei Microsystems Laboratory

Current Research Area

Micro-electric NOx converter

Micro-electric NOx converter

Principle
  • Electrically converting No into NO2 using a corona discharge process
Main idea
  • Electrical convertion → Volume treatment( high throughput)
  • DC power and optimized electrode → Good reproducibility and stable conversion efficiency

Fabrication


Result

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Integrated particle detection chip

Integrated particle detection chip

MEMS based micro corona discharger
  • Fabricate the Micro tip by MEMS method
  • Consist of upper plane electrode & Bottom micro tip electrode
  • SU-8 used for spacer between upper & bottom electrode

Fabrication


Result


Particle sensing module for environmental monitoring

Particle classifier
  • Principle
  • Separating aerosol particles into a straight low-velocity flow(minor flow) and a perpendicular high velocity flow(major flow)
  • High inertia particles are concentrated into the minor flow
Particle charging & detection
  • Principle
  • Charging part : Particle charging by corona discharge when potential gradient exceed a certain value
  • Sensing part : Particle sensing through the current induced by charged particle

Small form-factor particle sensing module

Virtual impactor

Virtual impactor

Principle
  • Separating aerosol particles into a straight low-velocity flow(minor flow) and a perpendicular high velocity flow(major flow)
Fabrication & Experiments

Tunable virtual impactor

Principle
  • An electrode pair is integrated in the virtual impactor
  • Collection diameter of a particle can be tuned by applying electrical potential
Fabrication & Result

Gas sensor

Micro – thermal gas sensor

Principle
  • Detection of temperature change caused by gas adsorption to a catalyst layer
Fabrication & Experiments

TiO2 based thin film NOx gas sensor

Principle
  • When the gaseous material is reacted with the metal oxide film, its conductance or resistance are changed.

Wall loss reduction

Wall loss reduction technique

Principle
  • Electrodynamic disturbances were generated by applying AC electric potentials to an interdigitated electrode pair which was integrated at the bottom of a microchannel
Fabrication & Experiments

Optical photographs before/after experiment


Wall loss reduction technique with DEP

Principle : Dielectrophoretic force on the interdigitate type electrodes
Fabrication and Results

Gas sensor based on PCB

Gas sensor based on PCB

Principle
  • Resistance or conductance change by reaction gas and catalyst → Laser sintering
    High intensive energy & short time Minimum of heat affected zone → A cheap and simple gas sensor based on PCB
Fabrication & Experiments

CPC (Condensation Particle Counter)

CPC (Condensation Particle Counter)

Principle
  • Single nanoparticle detection based on heterogeneous particle condensation technique and optical detection technique
Fabrication & Result

Nanoparticle analysis chip (effective density & size distribution)

Nanoparticle analysis chip (effective density & size distribution)

Principle
  • Simultaneously measuring size distribution and effective density of airborne nanoparticles via two characteristic particle diameters (mobility/aerodynamic diameter)
Fabrication & Result

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